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Chemical Vapour Deposition: Precursors, Processes and Applications
 

Chemical Vapour Deposition: Precursors, Processes and Applications (Hardback)

Edited by Jones, Anthony C.
Edited by Hitchman, Michael L.
Contributions by Krumdieck, Susan
Contributions by Chalker, Paul
Contributions by Aspinall, H.

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Written by leading experts in the field, this book gives a comprehensive overview of the various aspects of chemical vapour deposition processes and covers the basic concepts of types of CVD processes, the design of CVD reactors, reaction and reactor modelling, and the chemistry ...of CVD precursors and of deposition. There are detailed descriptions of the use of many CVD techniques to deposit a wide range of materials, including semiconductors, metals, metal oxides and nitrides, optical coatings, protective coatings and functional coatings on glass. Commercial aspects of CVD are also discussed, along with possible future trends. The book is aimed at CVD practitioners, such as the chemist who wishes to learn more about CVD processes, or the CVD technologist wishing to gain an increased knowledge of precursor chemistry.
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ISBN 9780854044658
Released NZ 22 Dec 2008
Publisher Royal Society of Chemistry
Format Hardback
Availability
Internationally sourced (on backorder); allow 4-8 weeks

Full details for this title

ISBN-13 9780854044658
Stock Available
Status Internationally sourced (on backorder); allow 4-8 weeks
Publisher Royal Society of Chemistry
Imprint Royal Society of Chemistry
Released 22 Dec 2008
Publication Country United Kingdom United Kingdom
Format Hardback
Author(s) Edited by Jones, Anthony C.
Edited by Hitchman, Michael L.
Contributions by Krumdieck, Susan
Contributions by Chalker, Paul
Contributions by Aspinall, H.
Category Non-Fiction (Child / Teen)
Industrial Chemistry
Metals Technology / Metallurgy
Number of Pages 600
Dimensions Width: 189mm
Height: 246mm
Spine: 36mm
Dewey Code 671.735;671.735
Weight 1,352g
Interest Age 19+ years
Reading Age 19+ years
Library of Congress Chemical vapor deposition
NBS Text Industrial Chemistry & Manufacturing
ONIX Text College/higher education;Professional and scholarly

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