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Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606
 

Chemical Processing of Dielectrics, Insulators and Electronic Ceramics: Volume 606 (Trade Paperback / Paperback)

Edited by Jones, Anthony C.
Edited by Veteran, Janice
Edited by Mullin, Donald
Edited by Cooper, Reid
Edited by Kaushal, Sanjeev

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This book focuses on the creative use of chemistry in the fabrication of a variety of oxide and non-oxide materials which are likely to play a crucial role in the development of the next generation of microelectronics devices. It includes inorganic precursor chemistry, gas-phase ...and solid-state chemistry, materials science, chemical physics and chemical engineering. Highlights include the deposition of high-k dielectric gate oxides, ferroelectric oxide films for infrared and memory applications, low-k dielectrics, TiN and TaN diffusion barriers, and fresh precursors for III-V nitrides. The emphasis is on chemical methods for the controlled deposition of thin films, for which chemical vapor deposition (CVD) has proven to be a useful and versatile technique. Of particular interest is the use of liquid-injection MOCVD for the deposition of oxide multilayers and superlattices. Solution deposition techniques such as sol-gel, metalorganic decomposition (MOD), hydrothermal processing are also prominently featured. Topics include: CVD of oxide ceramics; CVD of nonoxide ceramics; solution deposition of electronic ceramics; alternative chemical processing methods and characterization of electronic ceramics..
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ISBN 9781107413207
Released NZ 5 Jun 2014
Publisher Cambridge University Press
Format Trade Paperback/Paperback
Series Mrs Proceedings
Availability
Indent title (internationally sourced), allow 8-12 weeks

Full details for this title

ISBN-13 9781107413207
Stock Available
Status Indent title (internationally sourced), allow 8-12 weeks
Publisher Cambridge University Press
Imprint Cambridge University Press
Released 5 Jun 2014
Publication Country United Kingdom United Kingdom
Format Trade Paperback/Paperback
Author(s) Edited by Jones, Anthony C.
Edited by Veteran, Janice
Edited by Mullin, Donald
Edited by Cooper, Reid
Edited by Kaushal, Sanjeev
Series Mrs Proceedings
Category Ceramics & Glass Technology
Materials Science
Number of Pages 328
Dimensions Width: 152mm
Height: 229mm
Spine: 17mm
Dewey Code 620.1404297
Weight 440g
Interest Age 19+ years
Reading Age 19+ years
NBS Text Mechanical Engineering
ONIX Text College/higher education;Professional and scholarly

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