Books » Author » Anthony C. Jones
Edited by Jones, Anthony C.; Hitchman, Michael L.; Contributions by Krumdieck, Susan; Chalker, Paul; Aspinall, H.
Offers a comprehensive overview of the various aspects of chemical vapour deposition processes and covers the basic concepts of types of CVD processes, the design of CVD reactors, reaction and reactor modelling, and the chemistry of CVD precursors and of deposition.
Edited by Jones, Anthony C.; Veteran, Janice; Mullin, Donald; Cooper, Reid; Kaushal, Sanjeev
The MRS Symposium Proceeding series is an internationally recognised reference suitable for researchers and practitioners.
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