Books » Author » H. Aspinall
Edited by Jones, Anthony C.; Hitchman, Michael L.; Contributions by Krumdieck, Susan; Chalker, Paul; Aspinall, H.
Offers a comprehensive overview of the various aspects of chemical vapour deposition processes and covers the basic concepts of types of CVD processes, the design of CVD reactors, reaction and reactor modelling, and the chemistry of CVD precursors and of deposition.
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